Publikationer
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Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
Ingår i Surface & Coatings Technology, 2023.
DOI för Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance Ladda ner fulltext (pdf) av Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
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Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells
Ingår i ACS Applied Energy Materials, s. 12022-12028, 2022.
DOI för Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells Ladda ner fulltext (pdf) av Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells
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Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
Ingår i Solar RRL, 2022.
DOI för Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts Ladda ner fulltext (pdf) av Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
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High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
Ingår i ACS Applied Materials and Interfaces, s. 21173-21180, 2022.
DOI för High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching Ladda ner fulltext (pdf) av High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
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Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
Ingår i ACS Applied Energy Materials, s. 6335-6343, 2022.
DOI för Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates Ladda ner fulltext (pdf) av Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
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Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
Ingår i ACS Nano, s. 17938-17946, 2021.
DOI för Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation Ladda ner fulltext (pdf) av Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
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On the description of metal ion return in reactive high power impulse magnetron sputtering
Ingår i Surface & Coatings Technology, 2021.
DOI för On the description of metal ion return in reactive high power impulse magnetron sputtering Ladda ner fulltext (pdf) av On the description of metal ion return in reactive high power impulse magnetron sputtering
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Superconducting V3Si for quantum circuit applications
Ingår i Microelectronic Engineering, 2021.
DOI för Superconducting V3Si for quantum circuit applications
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Substrate Effects on Crystal Phase in Atomic Layer Deposition of Tin Monosulfide
Ingår i Chemistry of Materials, s. 2901-2912, 2021.
DOI för Substrate Effects on Crystal Phase in Atomic Layer Deposition of Tin Monosulfide Ladda ner fulltext (pdf) av Substrate Effects on Crystal Phase in Atomic Layer Deposition of Tin Monosulfide
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Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas
Ingår i Coatings, 2020.
DOI för Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas Ladda ner fulltext (pdf) av Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas
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High power impulse magnetron sputtering of diamond-like carbon coatings
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2020.
DOI för High power impulse magnetron sputtering of diamond-like carbon coatings
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Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
Ingår i Surface & Coatings Technology, 2020.
DOI för Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering Ladda ner fulltext (pdf) av Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
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Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
Ingår i ACS Applied Energy Materials, s. 2762-2770, 2020.
DOI för Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing Ladda ner fulltext (pdf) av Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
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A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
Ingår i Materials, 2020.
DOI för A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings Ladda ner fulltext (pdf) av A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
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Reactive high power impulse magnetron sputtering
Ingår i High Power Impulse Magnetron Sputtering, s. 223-263, 2020.
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Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics
Ingår i Coatings, 2020.
DOI för Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics Ladda ner fulltext (pdf) av Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics
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Back and front contacts in kesterite solar cells: state-of-the-art and open questions
Ingår i Journal of Physics, 2019.
DOI för Back and front contacts in kesterite solar cells: state-of-the-art and open questions Ladda ner fulltext (pdf) av Back and front contacts in kesterite solar cells: state-of-the-art and open questions
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Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
Ingår i Physica Status Solidi (a) applications and materials science, 2019.
DOI för Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells Ladda ner fulltext (pdf) av Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
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Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells
Ingår i The Journal of Physical Chemistry C, s. 26151-26160, 2019.
DOI för Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells
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Hydrogen site location in ultrathin vanadium layers by N-15 nuclear reaction analysis
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 57-60, 2019.
DOI för Hydrogen site location in ultrathin vanadium layers by N-15 nuclear reaction analysis
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Metal Filling by High Power Impulse Magnetron Sputtering
Ingår i Journal of Physics D, 2019.
DOI för Metal Filling by High Power Impulse Magnetron Sputtering
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Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne
Ingår i Coatings, 2018.
DOI för Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne Ladda ner fulltext (pdf) av Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne
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Bifacial Cu(In,Ga)Se2 solar cells using hydrogen‐doped In2O3 films as a transparent back contact
Ingår i Progress in Photovoltaics, s. 846-858, 2018.
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Using hydrogen‐doped In2O3 films as a transparent back contact in (Ag,Cu)(In,Ga)Se2 solar cells
Ingår i Progress in Photovoltaics, s. 159-170, 2018.
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Discharge runaway in high power impulse magnetron sputtering of carbon: the effect of gas pressure, composition and target peak voltage
Ingår i Journal of Physics D, 2018.
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Solid state p-type dye sensitized NiO-dye-TiO2 core-shell solar cells
Ingår i Chemical Communications, s. 3739-3742, 2018.
DOI för Solid state p-type dye sensitized NiO-dye-TiO2 core-shell solar cells
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Hard and dense diamond like carbon coatings deposited by deep oscillations magnetron sputtering
Ingår i Surface & Coatings Technology, s. 92-98, 2018.
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Improving the morphological stability of nickel germanide by tantalum and tungsten additions
Ingår i Applied Physics Letters, 2018.
DOI för Improving the morphological stability of nickel germanide by tantalum and tungsten additions Ladda ner fulltext (pdf) av Improving the morphological stability of nickel germanide by tantalum and tungsten additions
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Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Ingår i Applied Physics Letters, 2018.
DOI för Highly conductive ultrathin Co films by high-power impulse magnetron sputtering Ladda ner fulltext (pdf) av Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
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Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
Ingår i Physical Chemistry, Chemical Physics - PCCP, s. 36-40, 2018.
DOI för Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film Ladda ner fulltext (pdf) av Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
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Effect of KF absorber treatment on the functionality of different transparent conductive oxide layers in CIGSe solar cells
Ingår i Progress in Photovoltaics, s. 13-23, 2018.
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Electronic energy-loss mechanisms for H, He, and Ne in TiN
Ingår i Physical Review A: covering atomic, molecular, and optical physics and quantum information, 2017.
DOI för Electronic energy-loss mechanisms for H, He, and Ne in TiN
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Ion induced stress relaxation in dense sputter-deposited DLC thin films
Ingår i Applied Physics Letters, 2017.
DOI för Ion induced stress relaxation in dense sputter-deposited DLC thin films
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Formation of nickel germanides from Ni layers with thickness below 10 nm
Ingår i Journal of Vacuum Science & Technology B, 2017.
DOI för Formation of nickel germanides from Ni layers with thickness below 10 nm
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Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
Ingår i Journal of Applied Physics, 2017.
DOI för Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering Ladda ner fulltext (pdf) av Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
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Minimizing sputter-induced damage during deposition of WS2 onto graphene
Ingår i Applied Physics Letters, 2017.
DOI för Minimizing sputter-induced damage during deposition of WS2 onto graphene Ladda ner fulltext 1 (pdf) av Minimizing sputter-induced damage during deposition of WS2 onto graphene Ladda ner fulltext 2 (pdf) av Minimizing sputter-induced damage during deposition of WS2 onto graphene
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Synthesis of hydrogenated diamondlike carbon thin films using neon-acetylene based high power impulse magnetron sputtering discharges
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2016.
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Massive Ta diffusion observed in Cu thin films but not in Ag counterparts
Ingår i Journal of Vacuum Science & Technology B, 2016.
DOI för Massive Ta diffusion observed in Cu thin films but not in Ag counterparts
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Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1-xGaxSe2 thin film solar cells
Ingår i Solar Energy Materials and Solar Cells, s. 757-764, 2016.
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Broadband Optical Absorption Caused by the Plasmonic Response of Coalesced Au Nanoparticles Embedded in a TiO2 Matrix
Ingår i The Journal of Physical Chemistry C, s. 16931-16945, 2016.
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Toward synthesis of oxide films on graphene with sputtering based processes
Ingår i Journal of Vacuum Science & Technology B, 2016.
DOI för Toward synthesis of oxide films on graphene with sputtering based processes
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E-MRS 2015 Symposium EE: Protective coatings and thin films Preface
Ingår i Surface & Coatings Technology, s. 1-1, 2016.
DOI för E-MRS 2015 Symposium EE: Protective coatings and thin films Preface
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Hard and elastic epitaxial ZrB2 thin films on Al2O3(0001) substrates deposited by magnetron sputtering from a ZrB2 compound target
Ingår i Acta Materialia, s. 166-172, 2016.
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Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering
Ingår i Solar Energy Materials and Solar Cells, s. 137-144, 2016.
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Architectured columns with a metal-dielectric periodic nanostructure
Ingår i Materials letters (General ed.), s. 128-131, 2016.
DOI för Architectured columns with a metal-dielectric periodic nanostructure
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Toward synthesis of oxide films on graphene with sputtering based processes
Ingår i Journal of Vacuum Science and Technology B, 2016.
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Combinatorial magnetron sputtering of AgFeO2 thin films with the delafossite structure
Ingår i Materials & design, s. 132-142, 2016.
DOI för Combinatorial magnetron sputtering of AgFeO2 thin films with the delafossite structure Ladda ner fulltext (pdf) av Combinatorial magnetron sputtering of AgFeO2 thin films with the delafossite structure
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Reactive sputtering of CZTS
Ingår i Copper zinc tin sulfide-based thin film solar cells, s. 203-220, 2015.
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Gas flow sputtering of Cu(In,Ga)Se-2 for thin film solar cells
Ingår i 2015 IEEE 42ND PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2015.
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Thin films composed of gold nanoparticles dispersed in a dielectric matrix: The influence of the host matrix on the optical and mechanical responses
Ingår i Thin Solid Films, s. 8-17, 2015.
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Thin films composed of Ag nanoclusters dispersed in TiO2: Influence of composition and thermal annealing on the microstructure and physical responses
Ingår i Applied Surface Science, s. 595-604, 2015.
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Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering
Ingår i 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015.
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Magnetron sputtering of InGaZnO and ZnSnO amorphous oxide semiconductors
Ingår i E-MRS Spring meeting 2015, May 11-15, Lille, France, 2015.
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Metallization of nanostructures by High Power Impulse Magnetron Sputtering
Ingår i 4 th Magnetron, Ion processing & Arc Technologies European Conference, Paris, 8-11 December 2015, 2015.
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Applying "the upgraded Berg model" to predict hysteresis free reactive sputtering
Ingår i Surface & Coatings Technology, s. 39-43, 2015.
DOI för Applying "the upgraded Berg model" to predict hysteresis free reactive sputtering
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Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2015.
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Large-area homogeneous periodic surface structures generated on the surface sputtered boron carbide thin films by femtosecond laser processing
Ingår i Applied Surface Science, s. 161-169, 2015.
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Low temperature electronic transport in sputter deposited a-IGZO films
Ingår i Current applied physics, s. 1481-1485, 2014.
DOI för Low temperature electronic transport in sputter deposited a-IGZO films
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Dynamics of the sputtering target surface evolution in reactive HiPIMS
Ingår i Invited talk, 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014.
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Thin AlN films deposited by reactive HiPIMS and pulsed DC sputtering – a comparative study
Ingår i 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014.
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Reactive HiPIMS of Oxides: Hysteresis and Discharge behaviour
Ingår i Invited talk, 42th International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 -May 2, 2014, 2014.
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Measurement of Ionized Metal Flux Fraction in HiPIMS by Retarding Field QCM Analyzer
Ingår i 41st International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 - May 2, 2014, 2014.
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Infiltration of Spiro-MeOTAD hole transporting material into nanotubular TiO2 electrode for solid-state dye-sensitized solar cells
Ingår i Materials Science & Engineering, s. 67-74, 2014.
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Influence of composition, structure and testing atmosphere on the tribological performance of W-S-N coatings
Ingår i Surface & Coatings Technology, s. 86-94, 2014.
DOI för Influence of composition, structure and testing atmosphere on the tribological performance of W-S-N coatings Ladda ner fulltext (pdf) av Influence of composition, structure and testing atmosphere on the tribological performance of W-S-N coatings
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Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering
Ingår i Surface & Coatings Technology, s. 74-78, 2014.
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Mechanisms for compositional variations of coatings sputtered from a WS2 target
Ingår i Surface & Coatings Technology, s. 186-190, 2014.
DOI för Mechanisms for compositional variations of coatings sputtered from a WS2 target
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Hysteresis-free high rate reactive sputtering of niobium oxide, tantalumoxide, and aluminum oxide
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 041517-, 2014.
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Upgrading the “Berg-model” for reactive sputtering processes
Ingår i Thin Solid Films, s. 186-192, 2014.
DOI för Upgrading the “Berg-model” for reactive sputtering processes
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Reactive sputtering of Cu2ZnSnS4 thin films - Target effects on the deposition process stability
Ingår i Surface & Coatings Technology, s. 281-285, 2014.
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Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets
Ingår i Surface & Coatings Technology, s. 152-157, 2014.
DOI för Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets
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Sputter Rate Distribution and Compositional Variations in Films Sputtered from Elemental and Multi-Element Targets at Different Pressures
Ingår i International Journal of Materials Science and Applications, s. 29-36, 2014.
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Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed onSi(100)
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 031503-, 2014.
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Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings
Ingår i 19th International Conference on Wear of Materials 2013; 14-18 April 2013; Portland, OR, USA, 2013.
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HiPIMS deposition of TiOx in an industrial-scale apparatus: Effects of target size and deposition geometry on hysteresis
Ingår i Surface & Coatings Technology, s. 714-719, 2013.
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A study of the process pressure influence in reactive sputtering aiming at hysteresis elimination
Ingår i Surface & Coatings Technology, s. 357-361, 2013.
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Unique UV-Erasable In-Ga-Zn-O TFT Memory With Self-Assembled Pt Nanocrystals
Ingår i IEEE Electron Device Letters, s. 1011-1013, 2013.
DOI för Unique UV-Erasable In-Ga-Zn-O TFT Memory With Self-Assembled Pt Nanocrystals
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Novel Zn-Doped Al2O3 Charge Storage Medium for Light-Erasable In-Ga-Zn-O TFT Memory
Ingår i IEEE Electron Device Letters, s. 1008-1010, 2013.
DOI för Novel Zn-Doped Al2O3 Charge Storage Medium for Light-Erasable In-Ga-Zn-O TFT Memory
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Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
Ingår i Chemistry of Materials, s. 3162-3171, 2013.
DOI för Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes Ladda ner fulltext (pdf) av Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
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Anisotropic electrical resistivity during annealing of oriented columnar titanium films
Ingår i Materials letters (General ed.), s. 20-23, 2013.
DOI för Anisotropic electrical resistivity during annealing of oriented columnar titanium films
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Reactive magnetron sputtering: from fundamentals to high deposition rate processes
Ingår i Proceedings of the Twelfth th International Symposium on Sputtering & Plasma Processes ISSP 2013, s. 5-9, 2013.
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Tribochemically Active Ti–C–S Nanocomposite Coatings
Ingår i Materials Research Letters, s. 148-155, 2013.
DOI för Tribochemically Active Ti–C–S Nanocomposite Coatings Ladda ner fulltext (pdf) av Tribochemically Active Ti–C–S Nanocomposite Coatings
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Influence of Ti addition on the structure and properties of low-friction W–S–C coatings
Ingår i Surface & Coatings Technology, s. 340-348, 2013.
DOI för Influence of Ti addition on the structure and properties of low-friction W–S–C coatings
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Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides
Ingår i Journal of Applied Physics, s. 133302-, 2013.
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Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
Ingår i Thin Solid Films, s. 22-26, 2013.
DOI för Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells Ladda ner fulltext (pdf) av Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
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Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells
Ingår i Progress in Photovoltaics, s. 10-17, 2013.
DOI för Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells
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Defect minimization and morphology optimization in TiO2 nanotube thin films, grown on transparent conducting substrate, for dye synthesized solar cell application
Ingår i Thin Solid Films, s. 71-78, 2012.
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A Detrimental Reaction at the Molybdenum Back Contact in Cu2ZnSn(S,Se)4 Thin-Film Solar Cells
Ingår i Journal of the American Chemical Society, s. 19330-19333, 2012.
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Mechanisms responsible for compositional variations of films sputtered from a WS2 target
Ingår i International Conference on Metallurgical Coatings and Thin films (ICMCTF) 23-27/04 2012, San Diego, abstract number:428, 2012.
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Sulfur-doping of nc-TiC/a-C films by reactive sputtering
Ingår i Thirteenth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, 10-14 September 2012, 2012.
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Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering
Ingår i Surface & Coatings Technology, s. 5055-5059, 2012.
DOI för Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering
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Conformal Ni-silicide formation over three-dimensional device structures
Ingår i Applied Physics Letters, s. 053508-, 2012.
DOI för Conformal Ni-silicide formation over three-dimensional device structures
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Influence of precursor sulfur content on film formation and compositional changes in Cu2ZnSnS4 films and solar cells
Ingår i Solar Energy Materials and Solar Cells, s. 110-117, 2012.
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Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Ingår i Electrochemical and solid-state letters, s. H268-H270, 2011.
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Synthesis of c-tilted AlN films with a good tilt and thickness uniformity
Ingår i Proceedings of IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, s. 1238-1241, 2011.
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Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
Ingår i Surface & Coatings Technology, s. 1033-1036, 2011.
DOI för Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
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Chemical Insights into the Instability of Cu(2)ZnSnS(4) Films during Annealing
Ingår i Chemistry of Materials, s. 4625-4633, 2011.
DOI för Chemical Insights into the Instability of Cu(2)ZnSnS(4) Films during Annealing
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Sputter yield amplification by tungsten doping of Al(2)O(3) employing reactive serial co-sputtering: process characteristics and resulting film properties
Ingår i Journal of Physics D, s. 345501-, 2011.
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Studies of hysteresis effect in reactive HiPIMS deposition of oxides
Ingår i Surface & Coatings Technology, s. S303-S306, 2011.
DOI för Studies of hysteresis effect in reactive HiPIMS deposition of oxides
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Implantation and surface modification of TiO2 by a Focused Ion Beam
Ingår i E-MRS 2011 Spring Meeting, 2011.
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Serial magnetron co-sputtering: Sputtering yield amplification and process modelling
Ingår i E-MRS 2011 Spring Meeting, 2011.
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Ion irradiation-induced modification of TiO2 thin films
Ingår i E-MRS 2011 Spring Meeting, 2011.
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Nanocomposite coatings consisting of noble metal nanoclusters embedded into a dielectric matrix by reactive HIPIMS
Ingår i 2nd International Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011.
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Modelling of target effects in reactive HIPIMS
Ingår i 2nd Internation Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011.
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Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide
Ingår i Surface & Coatings Technology, s. 4828-4831, 2011.
DOI för Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide
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Process modelling for reactive magnetron sputtering
Ingår i Potential and Applications of Thin Ceramic and Metal Coatings 2011. 2nd PATCMC, 6th - 8th June, 2011 Plzeň, Czech Republic, s. 25-28, 2011.
Ladda ner fulltext (pdf) av Process modelling for reactive magnetron sputtering
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Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Ingår i Electrochemical and solid-state letters, s. H268-H270, 2011.
DOI för Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
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Localised modifications of anatase TiO2 thin films by a Focused Ion Beam
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 3142-3146, 2010.
DOI för Localised modifications of anatase TiO2 thin films by a Focused Ion Beam
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Modelling of sputtering yield amplification effect in reactive deposition of oxides
Ingår i Surface & Coatings Technology, s. 3882-3886, 2010.
DOI för Modelling of sputtering yield amplification effect in reactive deposition of oxides
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ERD analysis and modification of TiO2 thin films with heavy ions
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 1893-1898, 2010.
DOI för ERD analysis and modification of TiO2 thin films with heavy ions
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Modelling of low energy ion sputtering from oxide surfaces
Ingår i Journal of Physics D, s. 205204-, 2010.
DOI för Modelling of low energy ion sputtering from oxide surfaces
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Studies and Modelling of Surface Modifications of Different Oxides During Ion Bombardmen
Ingår i Presented at the 7th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2009), Busan, South Korea, September 20-25, 2009, 2009.
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Stable High Rate Reactive Sputter Deposition of Aluminium Oxide from Segmented Targets of Aluminium and Aluminium Oxide
Ingår i Presented at the International Symposium on Reactive Sputter Deposition (RSD2009), Manchester, United Kingdom, December 10-11, 2009, 2009.
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Decorative Oxide Coatings: Colour Control by Compositional Gradient
Ingår i E-MRS 2009, Spring Meeting in Strasbourgh, France, June 8-12, 2009, 2009.
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Increase of the Deposition Rate in Reactive Sputtering of Metal Oxides using a Ceramic Nitride Target
Ingår i Journal of Applied Physics, s. 093302-, 2009.
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Implantation of anatase thin film with 100 keV 56Fe ions: Damage formation and magnetic behaviour
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 2725-2730, 2009.
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Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
Ingår i Thin Solid Films, s. 5548-5552, 2009.
DOI för Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells Ladda ner fulltext (pdf) av Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
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Damage formation in TiO2 by heavy ions: consequences for micro- and nano-struring
Ingår i 7th International Symposium on Swift Heavy Ions in Matter (SHIM2008), 2008.
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Magnetic behaviour of Fe implanted TiO2 thin films
Ingår i Book of Abstracts, 2008.
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Experiments and modeling of dual reactive magnetron sputtering using two reactive gases
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 565-570, 2008.
DOI för Experiments and modeling of dual reactive magnetron sputtering using two reactive gases
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Nanoscale colour control: W-O graded coatings deposited by magnetron sputtering
Ingår i Nanotechnology, s. 395202-, 2008.
DOI för Nanoscale colour control: W-O graded coatings deposited by magnetron sputtering
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A model of DC reactive magnetron sputtering for graded solar thermal absorbers
Ingår i Journal of Physics, Conference Series, s. 082024-, 2008.
DOI för A model of DC reactive magnetron sputtering for graded solar thermal absorbers
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High rate reactive magnetron sputter deposition of titanium oxide
Ingår i Applied Physics Letters, s. 221501-, 2008.
DOI för High rate reactive magnetron sputter deposition of titanium oxide
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Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
Ingår i Plasma Processes and Polymers, s. S522-S526, 2007.
DOI för Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
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State of the art in Reactive Magnetron Sputtering
Ingår i Invited to The third Mikkeli International Industrial Coating Seminar, MIICS 2006, Mikkeli, Finland, March 16-18, 2006 and Conference Proceedings, 2006.
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Process Stabilization and Increase of the Deposition Rate in Reactive Sputtering of Metal Oxides and Oxynitrides
Ingår i Appl Phys Lett, 2006.
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Dynamic behaviour of the reactive sputtering process
Ingår i Thin Solid Films, s. 421-424, 2006.
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Modelling of the Plasma Impedance in Reactive Magnetron Sputtering for Various Traget Materials
Ingår i Proceedings of the 48th Annual Society of Vacuum Coaters Technical Conference in Denver, April 23-28, s. 298-301, 2005.
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Modelling of Sputter Erosion Rate Enchancement from Ceramic Targets
Ingår i Proc of the 48th Annual Society of Vacuum Coaters Technical Conference in Denver, USA, s. 298-301, 2005.
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Dynamic Behaviour of the Reactive Sputtering Process
Ingår i Presented at 13th International Congress on Thin Films 8th International Conference on Atomically Controlled Surfaces, Interfaces & Nanostructures (ICTF13/ACSIN8) in Stockholm, Sweden, 19-23 June 2005, 2005.
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Kinetic behaviour of target poisoning during reactive sputtering
Ingår i Reactive Sputter Deposition 2005 in Delft, The Netherlands, 2005.
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Ionenimplantation beim reaktiven Sputtern
Ingår i Presented at the 69. Annual Meeting of the Deutsche Physikalische Gesellschaft in Berlin, March, 2005.
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Ion Implantation Effects in Reactive Sputter Deposition
Ingår i Presented at the 14th Int. Conf. on Surface Modification of Materials by Ion Beams (SMMIB’05) in Kusadasi, Turkey, 4-9 September, 2005.
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Reactive Sputtering – Experiments and Modelling
Ingår i Invited to Sweden-China Symposium on Materials Science in Beijing, China, 10-13 May, 2005.
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Experimental Studies of the Dynamic Behavior of the Reactive Sputtering Process
Ingår i Presented at the 5th Asian-European Int. Conf. on Plasma Surface Engineering (AEPSE 2005) in Qingdao City, China, 12-16 September, 2005.
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Eliminating the hysteresis effect for reactive sputtering processes
Ingår i Appl Phys Lett, 2005.
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Fundamental understanding and modeling of reactive sputtering process
Ingår i Thin Solid Films, s. 215-230, 2005.
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Advances in Heuristic and Monte-Carlo Simulation of Reactive Sputtering and Technical Application
Ingår i Invited to the Symposium on Reactive Sputter Processes and Related Phenomena III, Ghent, Belgium, December 9-10, 2004.
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A Simplified Treatment of Target Implantation Effects in Reactive Sputtering
Ingår i The International Conference on Metallurgical Coatings and Thin Films in San Diego, USA, 2004.
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Modelling of Sputter Erosion Rate Enhancement from Ceramic Targets
Ingår i Proceedings of Society of Vacuum Coaters, s. 324.328-, 2004.
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Deposition of Ti2AIC and Ti3AIC2 epitaxial films by magnetron sputtering
Ingår i Applied Physics Letters, s. 1066-1067, 2004.
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Heuristic model of the plasma impedance in reactive magnetron sputtering
Ingår i 5th International Conference on Coatings on Glass, Saarbrücken, Germany, July, 2004.
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Influence of rotating magnets on hysteresis in reactive sputtering
Ingår i Society of Vacuum Coaters, 7th Annual Technical Conference Proceedings, April, 2004.
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Complex Target Poisoning Effects in Reactive Sputtering
Ingår i American Vacuum Society Symposium & Exhibition, Anaheim USA, 2004.
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Basic Understanding of Reactive Sputtering Processes
Ingår i Invited to the AVS 50th National Symposium in Baltimore, Maryland, USA, November 2-7, 2003, 2003.
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Basic Understanding of the Pulsed DC Reactive Spitter Deposition Process
Ingår i The 4th Asian-European Int Conf on Plasma Surface Engineering, AEPSE 2003, Jeju City, South Korea, September 28-October 2, 2003, 2003.
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Control of reactive sputtering process using two reactive gases
Ingår i Proc. of the AVS 4th International Conference on Microelectronics & Interfaces, Santa Clara, USA, s. 98-103, 2003.
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Stable Reactive Sputtering Processes
Ingår i ISSP 2003, The 7th International Symposium on Sputtering & Plasma Processes, June 11-13, Kanazawa, Japan, s. 235-239, 2003.
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Stable reactive sputtering using 2 reactive gases
Ingår i ICMCTF 2003, The International Conference on Metallurgical Coatings and Thin Films April 28 - May 2, San Diego, USA, 2003.
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Experimental and computer simulation studies of the
Ingår i J Vac Sci Technol, s. 1981-1987, 2003.
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Dynamic simulations of pulsed reactive sputtering processes
Ingår i J Vac Sci Technol, s. 503-508, 2000.
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Frequency response in pulsed DC reactive sputtering processes
Ingår i Thin Solid Films, s. 43-48, 2000.
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Basic Understanding of the Pulsed DC Reactive Sputter Deposition Process
Ingår i Invited to Second Asian-European Int Conf on Plasma Surface Engineering (AEPSE´99), Beijing, September 15-19, 1999.
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Target compound layer formation during reactive sputtering
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1827-1831, 1999.
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Target Compound Layer Formation during Reactive Sputtering
Ingår i Presented at AVS 45th National Symposium in Baltimore, Maryland, USA, November 2-6, 1998.
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Modeling of the deposition of stoichiometric Al2O3 using nonarcing direct current magnetron sputtering
Ingår i J Vac Sci Technol A, s. 1286-1292, 1998.
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Composition control by current modulation in dc-reactive sputtering
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1868-1872, 1998.
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Computer modeling as a tool to predict deposition rate and film composition in the reactive sputtering process
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1277-1285, 1998.
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The influence of the deposition angle on the composition of reactively sputtered thin films
Ingår i SURFACE & COATINGS TECHNOLOGY, s. 242-246, 1997.
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Diamond deposition from halogenated methane precursors on Si and SiC substrates
Ingår i Diamond and Related Materials, s. 85-88, 1997.
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Studies of reactive sputtering of multi-phase chromium nitride
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 248-252, 1997.
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Probe depth variation in grazing exit soft-X-ray emission spectroscopy
Ingår i NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, s. 558-562, 1997.
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In situ diagnostic studies of reactive co-sputtering from two targets by means of soft x-ray and optical emission spectroscopy
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 145-148, 1997.
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Diamond deposition in a microwave electrode discharge at reduced pressures
Ingår i DIAMOND AND RELATED MATERIALS, s. 224-229, 1997.