Micro- / Nanofabrication (general)

More advanced process services, typically including one or more patterning steps, require more profound preparation and project planning. A project could range from design through fabrication to evaluation. With in-house mask production and optical as well as e-beam lithography, features from some tens of nm and up can be provided. Silicon is normally the preferred material, to be used for the device or just as a carrier.

Contact:   Örjan Vallin
                 070 167 9348