Research tools and lab activities are divided into three units with a number of disciplines in each:

Materials Analysis

  • Electron Microscopy and Focused Ion Beam
  • Chemical Analysis
  • Metrology and Surface Characterization

Materials Synthesis

  • High Temperature Processing
  • Thin Film Deposition
  • Backend Processing

Micro- / Nanostructuring

  • Lithography
  • Wet Chemical Processing
  • Dry Etching

An equipment list and available processes / methods can be found in Myfab LIMS.

Last modified: 2023-06-26