Technology
Research tools and lab activities are divided into three units with a number of disciplines in each:
Materials Analysis
- Electron Microscopy and Focused Ion Beam
- Chemical Analysis
- Metrology and Surface Characterization
Materials Synthesis
- High Temperature Processing
- Thin Film Deposition
- Backend Processing
Micro- / Nanostructuring
- Lithography
- Wet Chemical Processing
- Dry Etching
An equipment list and available processes / methods can be found in Myfab LIMS.
Last modified: 2023-06-26