Technology

Research tools and lab activities are divided into three units with a number of disciplines in each:

Materials Analysis

• Electron Microscopy and Focused Ion Beam
• Chemical Analysis
• Metrology and Surface Characterization

Materials Synthesis

• High Temperature Processing
• Thin Film Deposition
• Backend Processing

Micro- / Nanostructuring

• Lithography
• Wet Chemical Processing
• Dry Etching

An equipment list and available processes / methods can be found in Myfab LIMS.